Nonlinear Vibration Analysis of an Electrostatically Actuated Microbeam using Differential Transformation Method
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Semiconductor Science and Information Devices
سال: 2020
ISSN: 2661-3212
DOI: 10.30564/ssid.v2i2.1887